Other In-Process Control

tec5USA Equipment Applications for Plasma Etching

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Plasma Etching

Devices created with semiconductors are ubiquitous, and include microelectronics, LEDs, and sensors. The design of electronics is enabled by the precise layering and masking of regions of interest on a wafer in order to create small features, such as transistors. At certain steps in the manufacturing process, material needs to be removed from the structure in order to separate regions. Dry etching, or plasma etching, involves using a hot, charged plasma to precisely remove material.

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Plasma Etching Process Monitoring

Difference etchants can be used, with different chemistries to match with process. Operation in vacuum environment results in a high level of cleanliness. Different layers can be deposited on the wafer that, upon etching, provide different spectral profiles that can be monitored both in real-time and in-process. Spectroscopy can be used with high sensitivity and fast response spectrometers to control etching process

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    Typical applications include white light interference for thin film analysis, UV absorption of proteins for quantitative analysis, colorimetry, impurity detection in water, cleaning validation for API manufacturing, polymerization inhibitor monitoring, electroplating bath monitoring....

    The spectroscopic methodology is determined by which parameters are important to monitor during a process. For example, if you want to monitor protein concentration in a bioreactor, in which the biosynthesis takes place in an aqueous medium, then you likely would want to use Raman spectroscopy for the application, as water does not contribute to the Raman signal. Alternatively, if moisture content is important, water has very strong absorption in the NIR due to several vibrational and combination modes that can be monitored; water is transparent in the UV and visible spectral region. Understanding which chemical is important as there could be various factors that influence the choice of methodology....

    NIR spectroscopy is utilized across a variety of industries for qualitative and quantitative product analysis. Typical industries include Chemistry, Pharmacology, Food Feed & Beverage, Agriculture, and others. NIR spectroscopy is well suited for species containing C-H, N-H & O-H bonds, making it a wide-range technology for a variety of applications such as moisture, fat, oil, alcohol, APIs, polymers, etc....

    Raman spectroscopy is a technique which is used for several markets. These industries include Oil and Gas, Pharmacology, Biotechnology, Petrochemistry and many others. Due to the high selectivity of Raman spectroscopy, it is a powerful tool for many applications including, hydrocarbon analysis, bioreactor protein monitoring, crystallization monitoring, API concentration, polymer identification, surfactant analysis, natural gas components and several others....

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